ANT95-XY Linear Motor Stage Brings Nanometer Accuracy AND Long Travel to Two-Axis Applications


Aerotech NanoTranslation (ANT95-XY, ANT95-XY-H) cross-roller-bearing, linear motor, dual-axis stages are the newest release and continue the evolution of ANT series stages. The ANT95-XY and ANT95-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm and a compact footprint. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, an integrated cable management system, and two grades of accuracy.

Stage Design
The ANT95-XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometrical tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling 5 nm resolution, 50 nm repeatability, and 250 nm accuracy in both the X and Y dimensions. Both travel options (25 mm x 25 mm or 50 mm x 50 mm) come with the 60 mm profile height.

The ANT95-XY uses anti-creep cross-roller bearings for impressive load capacity as well as higher precision and smaller incremental moves. You can expect outstanding accuracy, position repeatability, and in-position stability with the ANT95-XY stage.

Noncontact Direct-Drive
ANT95-XY stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is non-cogging, noncontact, high speed, high resolution, and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion. The integrated cable management system is designed for long life and to minimize drag forces.

Multi-Axis Configurations
The ANT95-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotary stages, goniometers) to create unique, high performance, multi-axis systems.

System Control
To get the most out of your ANT95-XY, Aerotech produces award-winning, high performance, single- and multi-axis motion controllers that excel in any application. The Automation 3200, Ensemble, and Soloist controllers are a perfect complement to your high-performance stage.


• Travel - 50 mm (2 in) • Accuracy(1) - ±250 nm (±10 µin) • Resolution - 1 nm • Repeatability (Bi-Directional) (1) - ±50 nm • Repeatability (Uni-Directional) (1) - ±25 nm • Straightness(1) - ±2.0 µm (±80 µin) • Flatness(1) - ±2.5 µm (±100 µin) • Pitch - 10 arc sec • Roll - 10 arc sec • Maximum Speed - 500 mm/s (20 in/s) (Upper Axis)
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