Compact, Economical Excimer Laser Offers High Performance


The new ExciStar XS from Coherent, Inc. (Santa Clara, CA) (Nasdaq: COHR) is a compact, economical excimer laser that offers exceptional performance and lifetime characteristics. Specifically, the air cooled ExciStar XS measures only 649 x 300 x 400 mm, yet delivers up to 10mJ/pulse at 193 nm with an energy stability of <2% (1*), at repetition rates of up to 500 Hz. The use of Almeta XS all metal tube construction, corona preionization, an all solid state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses. The ExciStar XS can operate at 157 nm (F2), 193 nm (ArF), 248 nm (KrF), or 351 nm (XeF). Its compact size and low total cost of ownership will make the ExciStar XS particularly attractive to laboratory and research users, especially for marking applications. In addition, the ExciStar XS is RoHS compliant.
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