DIRECT DRIVE ROTARY TABLES WITH LARGE CENTER APERTURE

Description

IntelLiDrives, Inc. new rotary table model RR-18-14 from the ROTORING direct drive rotary Series provides superior angular positioning and is designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives.
This rotary table combines axial brushless RotoLinear motoring modules and planar air bearings integrated into compact, direct drive configuration and provides unlimited rotation with precise positioning and velocity controls. ROTORING model RR-18-14 features center clear open aperture of 350 mm, total height 55 mm and delivers resolution of 1 arc-sec with torque of 32 Nm. When processing 300 mm semiconductor wafers, every area of the wafer can be accessed from both sides. In general automation applications large open center offers the opportunity to access parts from inside and outside of the table simultaneously. This feature allows robotic devices, pick and place and ancillary tooling to be mounted inside the table, saving floor space and reducing parts handling with increased productivity. Typical applications include semiconductor assembly equipment, wafer inspection and cutting, optical applications,
precision part indexing and robotics.
 

Specs

• Parameter RR-18-14 • Peak torque 30 • Repeatability, open loop 3 • Repeatability, with feedback 1.4 • Resolution, (note 1) 1.4 • Max speed 60 • Motor type (note2) 2 phase brushless • Number of phases 2 • Current per phase 1.5 • Bearing type air • Air bearing pressure 3.5 • Air bearing run-outs 5 • Air bearing gap 12 • Finish hard anodized aluminum • Outside diameter 450 • Aperture diameter 355 • Total height (rotor and stator) 56
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