High-Precision 6-Axis Micropositioning System for Vacuum Applications

Description

The M-824 Hexapod 6-Axis micropositioning and alignment system from nanopositioning specialist PI provides high resolution motion in 6 degrees of freedom. It is designed to work in a vacuum and combines multiaxis motion to 45 mm (linear) / 25 degrees (rotation) with sub-micron resolution and repeatability–ideal for alignment an precision positioning tasks.

The greatest Hexapod advantage is its compact size compared to conventional six-axis positioning systems, a fact that is especially beneficial in applications in vacuum chambers, where space is at a premium.

Typical Applications: Semiconductor technology, multi-axis alignment of optics,
X-ray microscopy, X-ray monochromators.

General Features & Advantages of Hexapods:
Compared to conventional stacked "serial" kinematics 6D micropositioning
systems the Hexpod (parallel kinematics) approach has the following advantages:

  • Smaller Envelope for Easy Integration
  • Higher Stiffness and Minimized Inertia for Faster Response and Alignment
  • No Moving Cables (No Friction) for Increased Reliability and Repeatability
  • Center of Rotation can be Changed with One Software Command
  • No Accumulation of Runout Errors—Better Multi-Axis Repeatability

Features of the M-824 Hexapod:

  • Design Resolution: 0.007 µm
  • Vacuum Compatible to 10-6 hPa
  • Compact Size: 280 mm Diameter x 190 mm Height
  • 6 Degrees of Freedom
  • Linear Travel Ranges : to 45 mm
  • Rotary Travel Ranges: to 25 deg.
  • Powerful Controller and Software for Alignment
  • 10 kg Load Capacity

Specs

• Active axes - X, Y, Z, X, Y, Z • *Travel range - X, Y±22.5 • *Travel range - Z±12.5 • *Travel range X, Y, - ±7.5 • *Travel range Z - ±12.5 • Single-actuator drive - DC-motor, gearhead • Actuator stroke - ±12.5 • Single-actuator design resolution - 0.007 • Sensor resolution – 2048 • **Min. incremental motion - X, Y, Z0.3 • **Min. incremental motion X, Y, Z - 3.5 • Repeatability X, Y, Z - ±0.5 • Repeatability X, Y, Z - ±6 • Max. velocity X, Y, Z – 1 • Max. velocity X, Y, Z – 11 • Typ. velocity X, Y, Z - 0.5 • Typ. velocity X, Y, Z - 5.5 • *Stiffness X, Y - 1.7 • Operating temperature range- -10 to +50
Be the first to review this product
Add your review:
RELATED STORIES