High Precision Micro Stages

Steinmeyer, Inc. announced a new high precision micro stage, the MT 196LM series. Available in two travel options, of either 100 mm or 200 mm, the MT196-100-2LM and the MT196-200-2LM is an excellent choice for applications in the semiconductor metrology, biomedical, miniature robotics and laser industry. The MT196LM has a footprint of 110 mm x 196 mm, height of 45 mm and, depending on which stage you choose, weighs 4.1 or 4.7 kgs.  

Manufactured from high strength anodized aluminum, this series of table offers a positional accuracy of 2 µm (micrometer), straightness/flatness runout of +/- 5 µm for 100 mm of travel and +/- 10 µm for 200 mm of travel with repeatability of +/- 0.2 µm.   Features include: preloaded cross roller bearings, fixed stops, incremental linear encoder with 0.1 µm resolution and a linear piezo motor drive. This product can be provided as a XY stage without any adapter plate.  Ultra high vacuum, clean room or non-magnetic preparation is available on request.