Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution


Auburn, MA,- PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage. The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.

Typical Applications
Nano-Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry

Features & Advantages 
  • Combines Advantages of Piezo-Flexure Drives & DC-Servo / Ballscrew Drives
  • Long Travel Ranges to 100 mm
  • 4 Nanometer Linear Encoder Resolution 
  • Reliable Execution of Nanometer Level Increments
  • Millisecond Settling Time to Nanometer Accuracy
  • Active Compensation of Stick/Slip During Startup and Settling 
  •  Active Backlash Compensation
  • Excellent Velocity Control
  • 100 kg Load Capacity 
  •  High Holding Forces with Minimum Power Consumption

Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 4 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling. It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.

Never Miss a Count: Novel High-Bandwidth Encoder Interface
The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).


• Travel range - 100 mm • Integrated sensor - Linear encoder • Travel range - 100 mm • Integrated sensor - Linear encoder • Sensor resolution - 0.002 µm • Design resolution - 0.002 µm • Min. incremental motion - 0.004 µm • Hysteresis at the platform - 0.01 µm • Unidirectional repeatability - 0.01 µm • Accuracy - <0.05 µm • Pitch - ±25 µrad • Yaw - ±25 µrad • Straightness - 1 µm • Flatness - 1 µm • Max. velocity - 50 mm/s • Origin repeatability - 1 µm • Drive screw - Recirculating ballscrews • Guiding - Precision linear guiding rails, recirculating ball bearings • Screw pitch - 2 mm/rev. • Max. load - 200 N • Max. push/pull force - 80/80 N • Max. lateral force- 200 N • Drive type - Hybrid drive: DC motor with low-inertia, flexure-decoupled and piezo actuated stage platform • Motor type - DC motor • Operating voltage (motor) - 24 V • Electrical power - 30 W • Piezo drive type- PICMA® Multilayer piezo with flexure • Piezo voltage - ±36 V • Limit and reference switches - Hall-effect • Operating temperature range - -20 to +65 °C • Material - Al (black anodized) • Mass - 5.1 kg
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