Leak Detector for Semiconductor Chambers

Description

Helping manufacturing maintenance teams easily check the tightness of vacuum chambers for wafer production, the UL3000 Fab leak provides an unrivaled simplicity. Offering a slim mobile design for easy maneuverability and an intuitive operating concept for easy operation, it detects even the smallest leakage rates up to 5 x 10-12 atm cc/s, thus providing the highest seal confirmation tightness of vacuum chambers for wafer production.

 

The powerful, compact, and smart leak detector enables testing at atmospheric pressure (through MASSIVE leak function) with best in class time to test or background generation, saturation protection, smart power and PM saving control all in a compact package. With its narrow design (only 18.6 in. wide), the mobile leak detector is designed for high maneuverability. Also, UL3000 Fab features robust construction, a deep center of gravity and large tires to ensure optimum mobility.

 

Once the leak is located, UL3000 Fab makes the user's work simple with a user-friendly rotating touch screen that offers a modern menu structure and an intuitive user interface. The menu can also be accessed via a mobile device - which makes the instrument easy to control remotely, particularly if the space conditions are cramped and the instrument is operated at some distance from the wafer manufacturing chamber. Another feature is the I·Zero 2.0 function which makes it possible to suppress helium background in the test object without affecting the accuracy and reliability of the test, so the leak test can begin more quickly.

 

UL3000 Fab PLUS also features HYDRO·S software which is capable of suppressing moisture and hydrogen effects on the helium leak rate. The result is the leak test can be started earlier. The I·Cal software algorithm is common to both models and ensures fast measurement results in the range of small leak rates of 5 x 10-9 atm cc/s to 5 x 10-12 atm cc/s.

 

While the UL3000 Fab is designed to ensure the tightness of wafer chambers by means of a helium vacuum test, the optional UL3000 Fab PLUS model also offers the user sniffer leak detection capability for pipes with various process gases. With the sniffer probe, leaks in pipes can be localized quickly and reliably. The SL3000 high-performance sniffer line is up to 10 m long and offers short reaction times even at great distances.

 

In addition, INFICON has equipped the new leak detector with all the necessary modern interfaces and is Industry 4.0 ready.

Specs

Min detectable leak rate for Helium
(Vacuum mode )
mbar•L/s   <5E-12
Min. detectable leak rate for Helium
(Sniffer mode )
mbar•L/s   5E-8
Max. Inlet pressure MASSIVE modembar   1000
Max. Inlet pressure FINE modembar   2
Max. Inlet pressure ULTRA modembar   0.4
Pumping speed during evacuationm³/h   > 30 at 50 Hz
Helium pumping speed ULTRA modeL/s   4
Detectable masses    2,3,4 amu
Mass spectrometer Sector field    180°
Calibrated built-in leakmbar•L/s   e-7
Test portDN 25 KF   1
In/Outputs    Via I/O 1000 module
Type of protection    IP 20
Weight kg                                             lb.                                                 120
Power consumptionVA   Typical 700, max. 1500

 

Features:

  • Ready to measure at atmospheric pressure
  • Intuitive user guidance with touch display
  • Robust vacuum system, insensitive to dirt and contamination
  • Perfect mobility due to small turning radius
  • Operable by smartphone via web browser
  • Low maintenance requirement
  • Accessories available right at the device
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