Mass Flow Controller


MCRH mass flow controller can accommodate flow rates of up to 5,000 slpm, without compromising speed or precision of gas control. The highly stable controller manages industrial processes with more chaotic upstream fluctuations, such as control of industrial combustion gases, or mass flow into food and packaging processes.

The MCRH 5,000-slpm precisely and rapidly controls mass flow rate, volumetric flow rate, or back pressure of gases in high flow processes. To overcome the poor turndown ratio and slow response of existing methods (such as interlinking a meter with an external valve), Alicat designed a new flow geometry. This new design accommodates the higher flow rates, with a low pressure drop of 14.1 psig at full scale. A dual valve design enables a fast 100-ms control response time without significantly raising instrument power requirements.



  • 50-100 ms speed of response stills upstream fluctuations
  • Accessible PID valve tuning for best speed and stability
  • Custom valve orifice sizing yields full-range stability
  • Control mass flow, volumetric flow or absolute pressure with one device
  • No warm-up: ready to control process flows in one second
  • Patented differential pressure-based flow measurement technology
  • Numerous user-selectable engineering units
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