Piezo Linear Motors


Piezo motor specialist PI (Physik Instrumente) L.P. offers a new family of ultrasonic piezo-motor-driven linear stages: Models M-663, M-664 and M-682 provide travel ranges to 50 mm in a very compact package.

Features & Advantages:

  • Easy Integration due to Very Small Footprint and Only 15 mm Profile Height
  • Vacuum Compatible & Non-Magnetic Versions
  • High Acceleration to 20 g for fast Start/Stop and High-Speed Scanning
  • Self-Locking when Powered Down, No Servo Dither in Steady State.
  • Fast: to 400 mm/s (16 inch/sec) for Time Sensitive Applications
  • No Heat Generation / Power Consumption in Steady State
  • High Accuracy Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Crossed Roller Bearings for Improved Guiding Accuracy
  • Travel Ranges 20, 25 and 50 mm (0.8 to 2 inch)

Keywords: Low-profile linear stage, compact X-Y combination, ceramic linear motor, non-magnetic, self locking, fieldless ultrasonic motor, piezo motor.

Typical Applications: Automation, Medical Devices, Analytical Equipment, Bio-Technology, Nanotechnology, Test & Measurement Equipment

High Accuracy and Push/Pull Force
For improved guiding accuracy, crossed roller bearings are mounted on precision ground aluminum profiles. A direct metrology linear encoder with 0.1 µm resolution provides high linearity and positioning accuracy. The integrated ceramic linear motors can generate push/pull forces up to 7 N, at speeds to 400 mm/sec.

Ultrasonic Motors, How Do They Work?
The ultrasonic piezo linear motor drive is based on an ultra-compact standing-wave PZT ceramic element. At the heart of the system is a rectangular monolithic piezoceramic plate (the stator), segmented on one side by two electrodes. Depending on the desired direction of motion, the left or right electrode of the piezoceramic plate is excited to produce high-frequency eigenmode oscillations of tens to hundreds of kilohertz. An alumina friction tip (pusher) attached to the plate moves along an inclined linear path at the eigenmode frequency.

Optimized Controller and Drive Electronics
For optimum performance the highly specialized C-886 motion controller is available. This sophisticated controller also integrates the drive electronics. A number of special features, including dynamic parameter switching for an optimized high-speed motion and settling behavior, take into account the motion characteristics typical of piezomotors. The broad-band encoder input (35 MHz) supports the high accelerations and velocities intrinsic to the PILine® piezo motors.


• Travel range - 25 mm • Integrated sensor - Linear encoder • Sensor resolution - 0.1 µm • Min. incremental motion - 0.3 µm • Bidirectional repeatability - 0.2 µm • Unidirectional repeatability - 0.2 µm • Pitch - ±50 µrad • Yaw - ±50 µrad • Max. velocity - 400 mm/s • Max. load - 25 N • Motor type - P-664 PILine® ultrasonic piezo drive • Operating voltage - 168 V • Electrical power - 10 W ** • Current - 800 mA ** • Operating temperature range - -20 to +50 °C
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