XY Piezoelectric Nanometrology Stages Feature Record Travel Range

Description

Auburn, MA, - June 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the new closed-loop P-628.2CD XY piezoelectric stages.
These precision flexure-guided scanning stages provide a record travel range of 1000 µm and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before. A lower cost, single axis version is also offered.

Typical Applications

Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, , Nanopositioning, Quality Assurance, Semiconductor Technology

Controllers: High Speed, Digital Control

A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.

Record Travel Range of 1000 µm, Yet Very Stiff and Precise

The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy with trajectory precision in the low-nanometer range. High acceleration forces are provided by multiple, newly-developed high-force multilayer piezo stack actuators.

Features & Advantages

  • 1000 µm XY-Travel Allows Probing Larger Areas
  • Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
  • Vacuum-Compatible
  • Stiff and Compact Design for High Resonant Frequencies and Easy Integration
  • Resolution <1 nm
  • Frictionless, Maintenance-Free Precision Flexure Guiding System
  • Ceramic-Encapsulated Piezo Drives for Humidity Protection
  • Capacitive Direct-Metrology Sensors for Faster Servo Response

Maintenance-Free, No Wear & Tear

Because flexure-guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.

Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors

The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

Specs

• Travel ranges - 800 x 800 µm (X, Y) • Unload resonant frequency - 75 Hz (X), 105 Hz (Y) • Load capacity - 10 N • Dimensions - 80 x 80 x (9.5 + 30) mm •
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