AZ60-A Motorized Vertical Elevator Stage
Description
AZ60-A Motorized Vertical Elevator Stage is a low profile, high resolution, wedge-type stage for precise vertical positioning.
The 3 x 2 in. (87 x 60 mm) drilled and tapped stage has a vertical travel of 5/32 in. (4 mm). The crossed roller guides and a precision ground 5/16 in. diameter (8 mm) 250 microns/turn lead ball screw provide smooth, straight movement. The stage delivers good parallelism and high resolutions to 1.25, 0.625, and 0.125 µm, and repeatability to +/- 0.5 µm. Travel speeds are up to 3/32 in./s (2.5 mm/s).
The stage is constructed of black-anodized aluminum alloy and weighs just 2.5 lb. (1 kg). A NEMA 14 2-phase stepper motor has a double-ended shaft with a knob for manual adjustments; this knob may be replaced with a quadrature encoder for position verification. The non-cantilevered moving wedge elevator stage has a load capacity of 15 lb. (7 kg) without concern for the loss of parallelism, and the base plate has easy access to the holes for mounting.
Specs
Table Size | 3 x 2 in. (87 x 60 mm) | |
---|---|---|
Range of Travel | 5/32 in. (4 mm) | |
Travel Guide | Ball screw 5/16 in. (8 mm), lead 250 µm/turn | |
Runway | Cross-roller lead-type | |
Load | 15 lb. (7 kg) | |
Body Weight | 2.5 lb. (1 kg) | |
Material | Aluminum Alloy | |
Surface treatment | Black Anodized | |
2-Phase Resolution | Resolution | 1.25/0.625 µm |
Micro Stepping (1/10 step) | 0.125 µm | |
Parallelism | 20 µm | |
Max. Speed | 3/32 in./s (2.5 mm/s) | |
Positioning Precision | 5 µm | |
Repeatability | +/- 0.5 µm | |
Parallelism | 30 µm | |
Dynamic Straightness | 5 µm | |
Dynamic Parallelism | 20 µm | |
Typical Phase Resistance | 2.7 Ohms, Bi-directional | |
Typical Phase Current | 1 A | |
DB 15 Male Connector | ||
Pin No. and Description | ||
1 | Stepper motor phase A+ | |
2 | Stepper motor phase A- | |
3 | Stepper motor phase B+ | |
4 | Stepper motor phase B- | |
5-8 | Not connected | |
9 | 5V DC power input | |
10 | One pulse/motor revolution | |
11 | 5V DC power input common | |
12-15 | Not connected |
Applications:
- Photonic alignment, wafer inspection, precision vertical alignment, laser marking
- Optical positioning, testing, inspection, assembly, sampling
- Laser drilling and machining in a broad range of industrial, medical, semiconductor, and research facilities