Bonded Slit Valve Door
Description
The Bonded Slit Valve (BSV) Door can increase life expectancy and improve seal performance for demanding semiconductor processing applications.
Made from Chemraz, Greene Tweed’s perfluoroelastomer (FFKM) compound, or other customer-requested elastomers, the seal better withstands dynamic use for longer life and leak elimination. Seal integrity is further enhanced by a design that fills the gland and avoids traditional molded parting lines.
The bonded-gate design can provide up to a ten-fold increase in seal life during wafer production. The design also minimizes abrasion, thereby reducing particulation and contamination.
Installation requires only removing and replacing a few bolts when replacing the complete BSV Door assembly.
Specs
- Designed to eliminate movement in gland for improved seal integrity and less wear
- Durable Chemraz or other fluorocarbon withstands dynamic use to increase life expectancy of slit valve doors
- Limited particle generation for lower contamination
- Designed to fill gland for improved seal integrity and elimination of potential leaks
- Optimal compression set for improved seal integrity and life
- Seal bonded to aluminum/stainless steel door to decrease replacement downtime, simplify installation, and ensure proper seal orientation without twisting
- No traditional molded parting lines for improved seal integrity