Cordis Flow Controller


The Cordis flow controller utilizes an extremely fast-reacting mems technology sensor upstream from a proportional valve, with the option of a DR-2 regulator for accurate and precise pressure control in a small package. Unlike other mass flow controllers that require a 30-minute warm-up time, large differential pressures, and limited flow ranges, the Cordis requires less than one-minute warm-up, its pressure drop is ≤14 in. H2O and it features flow ranges as low as 0 to 30 sccm. Standard control options include 0.2 to 10 VDC, 4.32 to 20 mA, and 3.3V DC serial.


The Cordis flow controller is adaptable to a variety of sensors that can close the loop around the flow.​


  • 50:1 turndown ratio
  • Compact size and weight
  • ≤14" H2O pressure drop
  • <1 minute warm-up
  • Multiple low flow ranges
  • <50 ms response time
  • ≤25 mV resolution
  • OEM style card unit or IP65 housed for light industrial applications
MediumClean, dry, non-corrosive gases
Wetted MaterialSensor:  Polyamide
Manifold: Anodized aluminum
Regulated Supply: ENP Brass
IP65 Housing: Polycarbonate
Valve Type:Normally-Closed Proportional
Operating Flow RangeMinimum: 0 to 15 sccm
Maximum: 0 to 6 l/min
Flow Range Sensors0 to 0.03 l/min, 0 to 0.2 l/min, 0 to 0.5 l/min, 0 to 1 l/min, 0 to 4 l/min, 0 to 6 l/min
Max. Inlet60 psig (4 bar)
Response Time<50 ms (application dependent)
Accuracy≤2% of full scale
Resolution≤25 mV
Max. Hysteresis≤1%
Pressure Drop≤14 in. H2O (≤356 mm)
Port Size1/8" NPT, G1/8
Temperature Range32 to 120°F (0 to 49°C)
Voltage15 to 24V DC
Current Draw≤250 mA max.
Protection RatingIP65 (housed unit only)
Warm-Up Period<1 minute
Signal/Command0.2 to 10V DC, 4.32 to 20 mA, 3.3V DC Serial
Turndown Ratio50:1
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