Hexapod Six-Axis Precision Parallel Kinematics Systems


PI (Physik Instrumente) L.P. -- a leading manufacturer of precision sensors and motion-control equipment for optics / photonics, nano / biotechnology, semiconductor and life science applications -- offers a new brochure on Hexapod 6-Axis Parallel Kinematics Robots and Positioning Systems.

The Hexapod system, (also known as Stewart Platform), which is supplied with a special motion controller, has unique features when compared to a stacked series of stages.

Advantages of Parallel Kinematics (PKM) Systems over
standard (stacked) Serial Kinematics Stages:

  • Programmable Pivot Point for Simple Rotational Alignment Tasks
  • Lower Inertia and Higher Stiffness
  • Better Dynamic Behavior
  • Smaller Package Size
  • No Accumulation of Position Errors, Reduced Runout Errors
  • No Moving Cables for Better Repeatability and Reliability

The brochure presents a variety of standard and custom hexapod systems, featuring sub-micrometer resolution, and load capacities from 2 kg to 1000 kg.

PI has been designing and manufacturing hexapod positioning robots since the early 1990’s. Today, standard hexapod designs come in all shapes and sizes and include servo motor-driven systems for moving large optics up to 1 m diameter to piezo based designs for nanometer precise control of semiconductor wafers and masks. Standard and custom systems are available in non-magnetic and vacuum compatible versions.

These parallel motion systems are designed for applications in fields such as:

  • Optics & Photonics, Telecommunication
  • Astronomy / Aerospace
  • Biotechnology
  • Semiconductor Test & Handling
  • Microscopy
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