High Precision, Low Profile Aperture Stage


The AU200-100x100 stage is a low-profile stage measuring just 80 mm high with a compact footprint (including the motors) of 348 x 348 mm. The linear travel of the X and Y axes is 100 x 100 mm, and the resolution of each axis is 20 microns (non-micro-step) or 1 micron (20 micro-steps per step motor driver in use), repeatability is 2 microns, and the positional accuracy is 3 microns.  The stages have preloaded V-groove and crossed roller bearings and ground 4 mm per-turn lead screws having just 2 microns of backlash, all contributing to the high precision and stiffness of the AU200-100x100 Stage.  Designed for applications such as: Laser drilling, machining, medical, industrial, semiconductor handling, testing, scanning, alignment, assembly, and optical applications, this compact, low profile black anodized aluminum XY stage is easy to integrate into new or existing systems. 


The XY stage's table measures 300 x 300 mm and the open aperture measures 188 x 188 mm. A recessed mounting and precision pattern of drilled and threaded mounting holes facilitate the alignment of tooling or fixtures. Additionally, solid tooling plates are available for custom and interchangeable applications. 


The standard two-phase (1.8o) stepper motors have knobs for manual adjustments of each axis of the stage, however, the knobs can be replaced with incremental encoders for position verification.  As an option, servo motors and compatible motion controllers are also available from OES, or the AU200-100x100 Stage can be ordered as a complete plug-and-play motion control system.

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