Model 1525 Low-G Series of MEMS DC Accelerometer Chips

Description

The Model 1525 Low-G Series of MEMS DC Accelerometer Chips is designed to offer reliable, accurate, and repeatable low-frequency (including seismic) vibration and acceleration measurements within a variety of inertial and industrial-grade applications, particularly where high-repeatability, premium performance, ultra-low noise, and maximum stability are required.

 

The key features of the series include its in-run bias stability, zero cross-coupling by design, and Allan Variances from 5 µg. With availability in five full-scale ranges, each MEMS DC accelerometer chip within the series incorporates one of Silicon Designs' high-performance sense elements together with a ±4.0V differential analog output stage, internal temperature sensor, and integral sense amplifier.

 

Each chip is designed to be relatively insensitive to wide temperature changes and gradients, including over its standard operating temperature range of -40 to +185°F (-40 to +85°C). Each device is marked on its top and bottom surfaces with a serial number for traceability. A calibration test sheet is also supplied with each unit, showing the MEMS DC accelerometer chip's measured bias, scale factor, linearity, operating current, and frequency response performance values.

Specs

  • In-run bias stability
  • Zero cross coupling by design
  • Allan variance from 5 µg
  • -40 to +185°F (-40 to +85°C) operation
  • ±4V differential output
  • +5 VDC, 5 mA power (typical)
  • Internal temperature sensor
  • Nitrogen damped
  • Hermetically sealed
  • Serialized for traceability
  • 0.35 in. (9 mm) sq. J-lead LCC-20 package 
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