Precision 3-Channel Controller


Digital servo controller with three channels offers greater flexibility for miniaturized precision positioning and handling tasks.

The new E-873.3QTU 3-axis controller complements the size of the ultra-compact positioners it controls, has integrated power amplifiers and interpolator, and is macro programmable for stand-alone functionality of each channel.

The E-873.3QTU is equipped with a data recorder for high speed tracing, ID chip compatibility for quick start-up and on-the-fly parameter changes, and exchange of system components without recalibration. The controllers are delivered with extensive software packages, including drivers for LabVIEW, as well as dynamic libraries for Windows and Linux.



  • precision alignment and automation
  • semiconductor technology
  • photonics
  • bio-nano-technology
  • metrology
  • microscopy
  • micro-manipulation
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