ServoBelt Arc Drive


The ServoBelt Arc Drive features custom designed rotary and tilt axes that position semiconductor glass panels. Measuring 17.7 in. (450 mm) across, the robot’s large rotary axis is built around a ServoBelt drive mechanism and a Bell-Everman bearing design. The large-diameter rotary stage on the robot can be scaled to larger sizes and is available as a separate product. The tilt axis, which moves the entire rotary stage assembly and its payload up to 90 degrees, is driven by an arc-shaped ServoBelt drive mechanism, which can also be scaled and applied to other tilt applications.


The stage offers

  • Torque rating of 200 N-m (400 N-m ultimate)
  • Speeds up to 150 rpm
  • Repeatability to ±22 µrad (0.001º)
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