Smallest Electro-Mechanical 6-Axis Hexapod Micropositioning System fits on Palm-Top


Auburn, MA, nanopositioning specialist PI has introduced the world’s smallest commercially available electro-mechanical, high-force Hexapod 6-axis micropositioning system.

After two decades of Hexapod design and manufacturing experience, PI electro-mechanical Hexapods and piezo Hexapods are among the most advanced multiaxis precision positioning systems in the world. The new M-810 ultra-compact miniature Hexapod is no exception.

Features and Advantages of the M-810 Miniature Hexapod

  • High-Force 6-Axis Hexapod with 5 kg Load Capacity
  • Very Compact: 10 cm Diameter, 11.8 cm Height
  • Sub-Micron Resolution
  • Long Travel Ranges to 40 mm (linear) and 60° (rotation)
  • Powerful Controller with Freely Definable Virtual Pivot Point
  • High Velocity of 10 mm/s
  • Operation in Any Orientation
  • Linear and Rotary Multi-Axis Scans

Parallel Kinematics Advantages

Parallel-kinematic motion systems have a number of advantages over standard serial kinematic (stacked) positioning systems:

  • Only one Moving Platform, No Accumulation of Guiding and Lever-Arm Errors
  • No Moving Cables for Improved Reliability and Precision
  • Smaller Package Size
  • Increased Stiffness, Reduced Inertia, Better Dynamics
  • Virtual Pivot Point


Smaller Motors and Encoders, Compatible with Existing Controllers

The limited space necessitated the usage of new technologies for encoders, motors and other integrated electronic components. Nevertheless, the M-810 is compatible with PI’s tried and proven hexapod controllers that are supported by windows software and a library of drivers and programming examples for applications such as optical alignment etc.

PI offers Hexapods with load ranges from 2 kg to >1000 kg.

About PI

PI is a leading manufacturer of parallel kinematics precision positioning equipment, piezo stages & motors for photonics, astronomy, bio-nanotechnology & semiconductor applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+


• *Travel range X, Y - ±20mm • *Travel range Z - ±6.5mm • *Travel range -θX, θY - ±11 ° • *Travel range θZ - ±30° • Actor drive - Brushless DC Motor, ActiveDrive™ • Actuator stroke - ±7.5 mm • Single-actuator design resolution - 0.04µm • Integrated sensor - Rotary encoder • Sensor resolution - 12800 Cts./rev. • **Min. incremental motion X, Y - 1µm • **Min. incremental motion - Z 0.2µm • **Min. incremental motion θX, θY, θZ - 3.5 µrad • Repeatability X, Y - ±2µm • Repeatability Z - ±0.5 µm • Repeatability θX, θY, θ - Z±5 µrad • Backlash X, Y - 2µm • Backlash Z - 0.5µm • Max. velocity X, Y, Z - 10mm/s • Max. velocity θX, θY, θZ - 250mrad/s • Typ. velocity X, Y, Z - 5mm/s • Typ. velocity θX, θY, θZ - 120mrad/s • Mechanical properties • Stiffness X, Y - 0.1N/µm • Stiffness Z - 4 N/µm • Max. load (baseplate horizontal / any orientation) - 5 / 2.5 kg • Operating temperature range - 0 to +50 °C • Material - Stainless steel, aluminum • Mass - 1.7kg • Operating Voltage - 100–240 VAC, 50/60 Hz
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