Soft-Pump Angle Valves


Soft-Pump Angle Valves adjust for chamber volume & pump speed Series 29 soft-pump angle valves provide a very wide range of soft-pump flow adjustment, so a single valve design accommodates numerous chamber volumes and pump speeds. Soft-pump conductance is easily adjusted with a recessed screw at the top of the actuator; adjustment is made in precise, repeatable steps and scale displays position information. Valve has minimal parts in the vacuum envelope, affording excellent particle performance, reliability, and ease of service. VAT, Inc., Woburn, MA (781) 537-5410
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