XYR-300-400 Alignment Stage
Description
The XYR-300-400 Alignment Stage offers +/- 0.0001 in. (3 μm) accuracy for industrial, medical, semiconductor, production, research, and laboratory applications; it features +/- 0.59 in. (15 mm) of travel in the X and Y axes and +/- 5-deg. of rotation (theta). It moves in XY-plane and rotates around the center of the XY-plane. It features linear resolutions of the X and Y axis of 0.00004 in. (1 μm) resolution with 10 micro-steps per step motor driver and static parallelism of less than 0.002 in. (0.05 mm).
Two-phase stepper motors are standard; however, servo motors with quadrature optical encoders are also available as an option for greater resolution and repeatability. The 0.3 in. (8 mm) diameter and 0.08 in. (2 mm) per-turn precision ball screws, preloaded V-groove, and crossed roller bearings add to the high precision and stiffness of this compact alignment stage.
The stage is black anodized aluminum and is easy to integrate into new or existing systems.
Specs
- The table of the stage is 11.8 x 11.8 in. (300 x 300 mm)
- 4.3 x 4.3 in. (110 x 110 mm) opening for optics, cables, etc.
- The base plate is 15.7 x 15.7 in. (400 x 400 mm)
- The height of the alignment stage is 3.9 in. (98 mm)