L-509 Precision Linear Stage


A high-precision linear translation stage family for High Vacuum (HV) and Ultra-High Vacuum (UHV) applications, the L-509 vacuum stage series, is offered for 3 different vacuum levels: 10-6, 10-7, and 10-9 hPa.


Linear motion ranges of 26, 52, and 102 mm are available. The precision-ground ball screw and high-resolution motors allow sub-micrometer resolution with excellent position repeatability up to 0.1 microns.


The vacuum linear stage series was designed from the ground up for vacuum compatibility, with each component qualified to work under the specified conditions. Everything, from the base materials, nuts and bolts, encoders, cables, and limit switches were selected for optimal performance.


Stage variants with closed-loop servo motors with position feedback encoders can be baked out up to 250°F (120°C), while for the highest vacuum levels, stepper motors (open-loop operation) are used. Here, bake-out temperatures of up to 300°F (150°C) can be reached.

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