PEV-1 Piezoelectric Gas Flow Valve




PEV-1 gas flow valve contains a piezoelectric crystal bender element that responds directly to a voltage signal causing the opening and closing of the valve. Constructed of stainless steel, this valve is ideally suited for vacuum sputtering, ion physics, mass spectrometry, and many other applications related to gas flow or pressure control in vacuum systems.


The PEV-1 valve is fail-safe so that in the event of a power loss the valve will automatically close and remain closed until power is restored. Industries served for this product would be fusion energy and reactors.


  • stainless steel construction
  • 0 to 525 sccm
  • precise linear control flow rate
  • suitable for all dry non-corrosive gases compatible with materials


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